Problem gasonics SNF 2008-09-23 22:00:01: Unload arm won't pick up wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 24 10:59:27 PDT 2008


Increased cda pressure from 40 psi to 50.  Also adjusted load arm height.  Cycled 30 wafers without any problems.




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