Problem gasonics SNF 2008-09-23 22:00:01: Unload arm won't pick up wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Sep 24 10:59:27 PDT 2008
Increased cda pressure from 40 psi to 50. Also adjusted load arm height. Cycled 30 wafers without any problems.
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