From duygu at snf.stanford.edu Wed Apr 1 18:44:19 2009 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Wed, 1 Apr 2009 18:44:19 -0700 Subject: Problem gasonics SNF 2009-04-01 18:44:19: wafer got stuck inside, gasonics is frozen Message-ID: It dropped one of my wafers and gave output casette full error. I tried to stop or resume the process but nothing worked it is frozen.One of my wafers is still inside. Please put it in the 4 inch box at the top of gasonics. From eenriquez at snf.stanford.edu Thu Apr 2 12:08:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Apr 2009 12:08:33 -0700 Subject: Problem gasonics SNF 2009-04-01 18:44:19: wafer got stuck inside, gasonics is frozen Message-ID: Reset the system and recovered the user's wafer. Cycled 40 wafers with no problems. From eenriquez at snf.stanford.edu Thu Apr 2 12:14:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Apr 2009 12:14:48 -0700 Subject: Problem gasonics SNF 2009-04-02 12:14:48: Intermittent cassette indexer problem Message-ID: Intermittent "unload cassette" fault. Need further troubleshooting. Will also try to locate a replacement indexer. If problem re-occurs: 1) Remove the unload cassette 2) Power the system OFF and back ON 3) If any wafer is in the system, allow it to unload onto the receive indexer platform. 4) Replace the unload cassette. From cbaxter at snf.stanford.edu Thu Apr 2 16:54:54 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Apr 2009 16:54:54 -0700 Subject: Comment gasonics SNF 2009-04-02 16:54:53: Delay Message-ID: I changed the delay time from 60 to 80 sec on send/received signal when wafer is detected on elevator platform.. From yeh at snf.stanford.edu Wed Apr 8 09:37:08 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 8 Apr 2009 09:37:08 -0700 Subject: Comment gasonics SNF 2009-04-08 09:37:07: recurrence of cassette full error Message-ID: ashed 3 wafers and got cassette full error on each wafer. power cycled after each wafer per 4/2/2009 (Elmer) comment to get through process. From ginel at snf.stanford.edu Fri Apr 10 14:50:50 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Fri, 10 Apr 2009 14:50:50 -0700 Subject: Problem gasonics SNF 2009-04-10 14:50:50: wafer dropped and cassette errors Message-ID: One wafer dropped when loading into receive cassette, others stuck in chamber after receive cassette full errors (when receive cassette was not full.) Power cycled machine per earlier comment to retrieve wafer. From eenriquez at snf.stanford.edu Mon Apr 13 11:13:15 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Apr 2009 11:13:15 -0700 Subject: Problem gasonics SNF 2009-04-10 14:50:50: wafer dropped and cassette errors Message-ID: Cycled 32 wafers with no problems. From tura at snf.stanford.edu Thu Apr 16 11:25:18 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 16 Apr 2009 11:25:18 -0700 Subject: Shutdown gasonics SNF 2009-04-16 11:25:17: 2" wafer got stuck inside Message-ID: I placed a 2" wafer on a 4" carrier wafer and did a strip, but the 2" wafer didn't come out. Please recover the wafer and put it in the box that I placed on the tool (valuable wafer!). Thanks. From mdickey at snf.stanford.edu Thu Apr 16 13:13:39 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Apr 2009 13:13:39 -0700 Subject: Shutdown gasonics SNF 2009-04-16 11:25:17: 2" wafer got stuck inside Message-ID: recovered wafer....Wafer at machine From ginel at snf.stanford.edu Mon Apr 27 18:38:20 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Mon, 27 Apr 2009 18:38:20 -0700 Subject: Problem gasonics SNF 2009-04-27 18:38:19: send cassette dirty Message-ID: From nvgirish at snf.stanford.edu Tue Apr 28 21:47:13 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Tue, 28 Apr 2009 21:47:13 -0700 Subject: Problem gasonics SNF 2009-04-28 21:47:11: Output Cassette Full Error Message-ID: Hi all Gasonics output cassette is not going down. Tried the routine that Elmer had suggested (Power OFF and ON). Does not work. Thanks From eenriquez at snf.stanford.edu Thu Apr 30 07:43:01 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Apr 2009 07:43:01 -0700 Subject: Problem gasonics SNF 2009-04-28 21:47:11: Output Cassette Full Error Message-ID: Reset the system