Problem gasonics SNF 2009-04-01 18:44:19: wafer got stuck inside, gasonics is frozen

duygu at duygu at
Wed Apr 1 18:44:19 PDT 2009

It dropped one of my wafers and gave output casette full error. I tried to stop or resume the process but nothing worked it is frozen.One of my wafers is still inside. Please put it in the 4 inch  box at the top of gasonics.

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