Problem gasonics SNF 2009-04-01 18:44:19: wafer got stuck inside, gasonics is frozen

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Apr 2 12:08:33 PDT 2009


Reset the system and recovered the user's wafer.  Cycled 40 wafers with no problems.  




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