Problem gasonics SNF 2009-04-02 12:14:48: Intermittent cassette indexer problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Apr 2 12:14:48 PDT 2009


Intermittent "unload cassette" fault.  Need further troubleshooting.  Will also try to locate a replacement indexer.
If problem re-occurs:
     1) Remove the unload cassette
     2) Power the system OFF and back ON
     3) If any wafer is in the system, allow it to unload onto the receive indexer platform.
     4) Replace the unload cassette.




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