Comment gasonics SNF 2009-04-08 09:37:07: recurrence of cassette full error

yeh at yeh at
Wed Apr 8 09:37:08 PDT 2009

ashed 3 wafers and got cassette full error on each wafer.  power cycled after each wafer per 4/2/2009 (Elmer) comment to get through process.

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