Comment gasonics SNF 2009-04-08 09:37:07: recurrence of cassette full error

yeh at snf.stanford.edu yeh at snf.stanford.edu
Wed Apr 8 09:37:08 PDT 2009


ashed 3 wafers and got cassette full error on each wafer.  power cycled after each wafer per 4/2/2009 (Elmer) comment to get through process.




More information about the gasonics-pcs mailing list