Problem gasonics SNF 2009-04-10 14:50:50: wafer dropped and cassette errors

ginel at ginel at
Fri Apr 10 14:50:50 PDT 2009

One wafer dropped when loading into receive cassette, others stuck in chamber after receive cassette full errors (when receive cassette was not full.)  Power cycled machine per earlier comment to retrieve wafer.

More information about the gasonics-pcs mailing list