Shutdown gasonics SNF 2009-04-16 11:25:17: 2" wafer got stuck inside

tura at snf.stanford.edu tura at snf.stanford.edu
Thu Apr 16 11:25:18 PDT 2009


I placed a 2" wafer on a 4" carrier wafer and did a strip, but the 2" wafer didn't come out. Please recover the wafer and put it in the box that I placed on the tool (valuable wafer!). Thanks.




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