From iwjung at snf.stanford.edu Sat Aug 1 17:28:04 2009 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Sat, 1 Aug 2009 17:28:04 -0700 Subject: Comment gasonics SNF 2009-08-01 17:28:04: lamp 1 fail message Message-ID: I see the bright glow in the beginning 10 secs so it seems the hi lamp is still working. From gth at snf.stanford.edu Thu Aug 6 02:01:35 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 6 Aug 2009 02:01:35 -0700 Subject: Problem gasonics SNF 2009-08-06 02:01:35: wafer broke twice - system stuck ! Message-ID: receiver cassette not going down. From slcheng at snf.stanford.edu Thu Aug 6 02:29:06 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Thu, 6 Aug 2009 02:29:06 -0700 Subject: Shutdown gasonics SNF 2009-08-06 02:29:06: receiving stage can't go down Message-ID: From mdickey at snf.stanford.edu Thu Aug 6 13:43:46 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 6 Aug 2009 13:43:46 -0700 Subject: Shutdown gasonics SNF 2009-08-06 02:29:06: receiving stage can't go down Message-ID: Elmer reset the system From king at snf.stanford.edu Fri Aug 7 14:36:51 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 7 Aug 2009 14:36:51 -0700 Subject: Shutdown gasonics SNF 2009-08-07 14:36:50: Unloading errors Message-ID: The wafers hits the receive cassette and falls into the machine. From king at snf.stanford.edu Fri Aug 7 14:37:49 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 7 Aug 2009 14:37:49 -0700 Subject: Problem gasonics SNF 2009-08-07 14:37:48: Need dummy wafers Message-ID: The dummy wafers are missing / broken. From king at snf.stanford.edu Fri Aug 7 17:43:32 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 7 Aug 2009 17:43:32 -0700 Subject: Comment gasonics SNF 2009-08-07 17:43:32: will this be shut down all weekend? Message-ID: Or can someone take a look today, thanks. It's the same problem as previously written about. From shott at snf.stanford.edu Sun Aug 9 10:31:53 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 9 Aug 2009 10:31:53 -0700 Subject: Shutdown gasonics SNF 2009-08-07 14:36:50: Unloading errors Message-ID: Folks tell me that they can get useful work done by manually unloading wafers. As a result, I'm clearing the shutdown to let them try in hopes that they will report what they find and, if they successfull load/unload wafers will tell us about it. Thanks, John From emyers at snf.stanford.edu Mon Aug 10 08:08:17 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 10 Aug 2009 08:08:17 -0700 Subject: Problem gasonics SNF 2009-08-07 14:37:48: Need dummy wafers Message-ID: Dummy wafers have never been provided for this system. From cbaxter at snf.stanford.edu Wed Aug 12 21:00:41 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Aug 2009 21:00:41 -0700 Subject: Problem gasonics SNF 2009-07-26 15:39:35: RF Warning Message-ID: From cbaxter at snf.stanford.edu Wed Aug 12 21:01:15 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Aug 2009 21:01:15 -0700 Subject: Problem gasonics SNF 2009-08-06 02:01:35: wafer broke twice - system stuck ! Message-ID: Changed fuse on rec elevator From cbaxter at snf.stanford.edu Wed Aug 12 21:01:34 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Aug 2009 21:01:34 -0700 Subject: Comment gasonics SNF 2009-08-07 17:43:32: will this be shut down all weekend? Message-ID: From cbaxter at snf.stanford.edu Wed Aug 12 21:01:40 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Aug 2009 21:01:40 -0700 Subject: Problem gasonics SNF 2009-07-29 21:58:13: Receiver cassette fails to lower Message-ID: From gth at snf.stanford.edu Thu Aug 13 01:50:48 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 13 Aug 2009 01:50:48 -0700 Subject: Shutdown gasonics SNF 2009-08-13 01:50:47: system stuck. Message-ID: Receiver cassette problem again. From mdickey at snf.stanford.edu Thu Aug 13 13:56:06 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 13 Aug 2009 13:56:06 -0700 Subject: Shutdown gasonics SNF 2009-08-13 01:50:47: system stuck. Message-ID: There is some flakey connection on the receiving index circuit board. I sprayed some contact cleaner and cycled 15 wafers without any problems.Wafer still does not center on load perfectly. Use at own risk. From eenriquez at snf.stanford.edu Wed Aug 19 09:54:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Aug 2009 09:54:40 -0700 Subject: Shutdown gasonics SNF 2009-08-19 09:54:39: Receiver cassette problem Message-ID: Receiver cassette not going down. From eenriquez at snf.stanford.edu Wed Aug 19 16:29:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Aug 2009 16:29:50 -0700 Subject: Shutdown gasonics SNF 2009-08-19 09:54:39: Receiver cassette problem Message-ID: Lubricated both the input and the output cassette indexer lead screw From raneeyoo at snf.stanford.edu Thu Aug 20 13:42:14 2009 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Thu, 20 Aug 2009 13:42:14 -0700 Subject: Problem gasonics SNF 2009-08-20 13:42:14: drop a wafer Message-ID: Hello! It dropped a wafer after processing. thanks. From eenriquez at snf.stanford.edu Thu Aug 27 10:02:25 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 27 Aug 2009 10:02:25 -0700 Subject: Problem gasonics SNF 2009-08-20 13:42:14: drop a wafer Message-ID: Wafer has been removed From emyers at snf.stanford.edu Fri Aug 28 07:48:39 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 28 Aug 2009 07:48:39 -0700 Subject: Comment gasonics SNF 2009-06-18 20:42:50: cycled 8 wafers (rcp 014), works fine ! Message-ID: Archived From emyers at snf.stanford.edu Fri Aug 28 07:49:22 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 28 Aug 2009 07:49:22 -0700 Subject: Problem gasonics SNF 2009-06-30 18:58:52: gas 1 flow error again Message-ID: Archived. On going active reports of this problem. From emyers at snf.stanford.edu Fri Aug 28 07:49:32 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 28 Aug 2009 07:49:32 -0700 Subject: Problem gasonics SNF 2009-07-05 14:09:44: gas1 low flow error. can't start processing Message-ID: Archived. On going active reports of this problem. From emyers at snf.stanford.edu Fri Aug 28 07:49:59 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 28 Aug 2009 07:49:59 -0700 Subject: Problem gasonics SNF 2009-07-15 13:45:13: Gas 1 flow rate low Message-ID: Archived. On going active reports of this problem.