Shutdown gasonics SNF 2009-08-13 01:50:47: system stuck.

mdickey at snf.stanford.edu mdickey at snf.stanford.edu
Thu Aug 13 13:56:06 PDT 2009


There is some flakey connection on the receiving index circuit board.
I sprayed some contact cleaner and cycled 15 wafers without any
problems.Wafer still does not center on load perfectly. Use at own
risk.




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