Comment gasonics SNF 2009-06-18 20:42:50: cycled 8 wafers (rcp 014), works fine !
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Fri Aug 28 07:48:39 PDT 2009
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Problem gasonics SNF 2009-08-20 13:42:14: drop a wafer
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Problem gasonics SNF 2009-06-30 18:58:52: gas 1 flow error again
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Problem gasonics SNF 2009-08-20 13:42:14: drop a wafer
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