Problem gasonics SNF 2009-06-30 18:58:52: gas 1 flow error again

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri Aug 28 07:49:22 PDT 2009

Previous message: Comment gasonics SNF 2009-06-18 20:42:50: cycled 8 wafers (rcp 014), works fine !
Next message: Problem gasonics SNF 2009-07-05 14:09:44: gas1 low flow error. can't start processing
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Archived.  On going active reports of this problem.

Previous message: Comment gasonics SNF 2009-06-18 20:42:50: cycled 8 wafers (rcp 014), works fine !
Next message: Problem gasonics SNF 2009-07-05 14:09:44: gas1 low flow error. can't start processing
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the gasonics-pcs mailing list