From zpatel at snf.stanford.edu Wed Dec 2 14:59:22 2009 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 2 Dec 2009 14:59:22 -0800 Subject: Comment gasonics SNF 2009-12-02 14:59:21: Request to Shadow/Get trained on Gasonics Message-ID: Hello All, I need to shadow / get trained by an experienced user for gasonics plasma asher. Please let me know if you can help. I would like to thank you for your time and efforts Best Regards, Zubin From barlian at snf.stanford.edu Thu Dec 3 03:04:02 2009 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Thu, 3 Dec 2009 03:04:02 -0800 Subject: Problem gasonics SNF 2009-12-03 03:04:02: my wafer broke inside the chamber Message-ID: half of it From jwpchen at snf.stanford.edu Thu Dec 3 07:08:07 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 3 Dec 2009 07:08:07 -0800 Subject: Comment gasonics SNF 2009-12-03 07:08:07: cassettes dirty Message-ID: both cassettes splattered with fragments of a thin substrate, blowed off most of the larger chunks but many flakes remain From eenriquez at snf.stanford.edu Thu Dec 3 10:20:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Dec 2009 10:20:10 -0800 Subject: Problem gasonics SNF 2009-12-03 03:04:02: my wafer broke inside the chamber Message-ID: Cleaned the chamber, cassettes and the loading area. Cycled 20 wafers with no problems. From eenriquez at snf.stanford.edu Thu Dec 3 10:20:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Dec 2009 10:20:30 -0800 Subject: Comment gasonics SNF 2009-12-03 07:08:07: cassettes dirty Message-ID: Cleaned the cassettes. From jasonlin at snf.stanford.edu Sun Dec 6 16:26:57 2009 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 6 Dec 2009 16:26:57 -0800 Subject: Problem gasonics SNF 2009-12-06 16:26:57: RF Warning Message-ID: RF Warning after stripping one of my wafers. Other wafers went through fine. From cbaxter at snf.stanford.edu Tue Dec 8 00:58:27 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 8 Dec 2009 00:58:27 -0800 Subject: Problem gasonics SNF 2009-12-06 16:26:57: RF Warning Message-ID: Adjusted tuning slug 1/8 of turn cw. From ywidjaja at snf.stanford.edu Thu Dec 10 03:49:25 2009 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Thu, 10 Dec 2009 03:49:25 -0800 Subject: Problem gasonics SNF 2009-12-10 03:49:25: Output cassette full error Message-ID: Keep getting the above error message. There's still a wafer inside. From cbaxter at snf.stanford.edu Thu Dec 10 19:20:17 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 10 Dec 2009 19:20:17 -0800 Subject: Problem gasonics SNF 2009-12-10 03:49:25: Output cassette full error Message-ID: Reset output cassette. From gth at snf.stanford.edu Fri Dec 11 02:27:10 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 11 Dec 2009 02:27:10 -0800 Subject: Problem gasonics SNF 2009-12-11 02:27:09: input cassette - unable to get wafer in first catch. Message-ID: From cbaxter at snf.stanford.edu Tue Dec 15 01:41:13 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 15 Dec 2009 01:41:13 -0800 Subject: Problem gasonics SNF 2009-12-11 02:27:09: input cassette - unable to get wafer in first catch. Message-ID: Adjusted load arm up.. From rik at snf.stanford.edu Tue Dec 15 15:13:30 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Tue, 15 Dec 2009 15:13:30 -0800 Subject: Problem gasonics SNF 2009-12-15 15:13:29: Lost a few chips Message-ID: 6 chips fell off the holder while running a PR strip. Sorry about that. Put a chip carrier on top of the machine. If you can recover the chips, I'd appreciate it. Thanks. From cbaxter at snf.stanford.edu Mon Dec 21 10:02:55 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 21 Dec 2009 10:02:55 -0800 Subject: Problem gasonics SNF 2009-12-15 15:13:29: Lost a few chips Message-ID: Recovered wafer chips