From cbaxter at snf.stanford.edu Sat Feb 7 09:53:08 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 Feb 2009 09:53:08 -0800 Subject: Shutdown gasonics SNF 2009-02-07 09:53:08: Backing pump is leaking oil.. Message-ID: From cbaxter at snf.stanford.edu Sat Feb 7 15:13:32 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 Feb 2009 15:13:32 -0800 Subject: Shutdown gasonics SNF 2009-02-07 09:53:08: Backing pump is leaking oil.. Message-ID: John and I changed the main backing pump, also installed filter. From jsuarez at snf.stanford.edu Tue Feb 10 10:20:54 2009 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Tue, 10 Feb 2009 10:20:54 -0800 Subject: Problem gasonics SNF 2009-02-10 10:20:53: gas1 flow problem Message-ID: too low From narii at snf.stanford.edu Thu Feb 12 10:21:43 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Thu, 12 Feb 2009 10:21:43 -0800 Subject: Problem gasonics SNF 2009-02-12 10:21:42: Output cassette full error Message-ID: An error occurs while running it in EE410 class. Both stop and start button do not answer. From eenriquez at snf.stanford.edu Thu Feb 12 11:42:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Feb 2009 11:42:23 -0800 Subject: Problem gasonics SNF 2009-02-12 10:21:42: Output cassette full error Message-ID: Reset the system. From cbaxter at snf.stanford.edu Thu Feb 12 14:10:40 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 12 Feb 2009 14:10:40 -0800 Subject: Problem gasonics SNF 2009-02-10 10:20:53: gas1 flow problem Message-ID: Flowed o2 w/out problem.. From cmcg at snf.stanford.edu Mon Feb 16 15:39:32 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 16 Feb 2009 15:39:32 -0800 Subject: Problem gasonics SNF 2009-02-16 15:39:31: gas 1 flow rate low Message-ID: ERROR, gas 1 flow rate low From sbasumal at snf.stanford.edu Wed Feb 18 15:39:04 2009 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Wed, 18 Feb 2009 15:39:04 -0800 Subject: Problem gasonics SNF 2009-02-18 15:39:03: 0 Message-ID: The 0 on the keypad works sporadically From cbaxter at snf.stanford.edu Wed Feb 18 16:20:34 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Feb 2009 16:20:34 -0800 Subject: Problem gasonics SNF 2009-02-16 15:39:31: gas 1 flow rate low Message-ID: working fine From damodei at snf.stanford.edu Fri Feb 20 00:38:15 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Fri, 20 Feb 2009 00:38:15 -0800 Subject: Shutdown gasonics SNF 2009-02-20 00:38:15: system error won't reset Message-ID: The output casette moved all the way up too early, leading to an "output casette full" error. Start and stop buttons aren't responding, so can't abort or resume. One wafer is still in the etch chamber. From damodei at snf.stanford.edu Fri Feb 20 00:43:38 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Fri, 20 Feb 2009 00:43:38 -0800 Subject: Problem gasonics SNF 2009-02-20 00:43:37: system error won't reset Message-ID: I shut down the system but my shutdown comment isn't showing up, so I'm duplicating it here: output casette moved all the way up too early, leading to an "output casette full" error. Neither start (resume) nor stop (abort) buttons is responding. A wafer is still in the etch chamber. From eenriquez at snf.stanford.edu Fri Feb 20 11:43:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Feb 2009 11:43:17 -0800 Subject: Shutdown gasonics SNF 2009-02-20 00:38:15: system error won't reset Message-ID: Power cycled the system and recovered the user's wafer. Ran 4 wafers with no problems. From eenriquez at snf.stanford.edu Fri Feb 20 11:43:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Feb 2009 11:43:22 -0800 Subject: Problem gasonics SNF 2009-02-20 00:43:37: system error won't reset Message-ID: Power cycled the system and recovered the user's wafer. Ran 4 wafers with no problems. From yuhykr at snf.stanford.edu Mon Feb 23 22:55:25 2009 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Mon, 23 Feb 2009 22:55:25 -0800 Subject: Shutdown gasonics SNF 2009-02-23 22:55:24: GAS1 flow too low Message-ID: From cbaxter at snf.stanford.edu Tue Feb 24 17:13:30 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 24 Feb 2009 17:13:30 -0800 Subject: Shutdown gasonics SNF 2009-02-23 22:55:24: GAS1 flow too low Message-ID: The problem is on ihte pick and place controller pcb, problem is intermitten. I reset the controller pcb and cycled for 1hrs w/out problem. I'm getting a loaner contoller pcb and will change it tomorrow, the tool is ok to use. From damodei at snf.stanford.edu Wed Feb 25 21:09:00 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Wed, 25 Feb 2009 21:09:00 -0800 Subject: Comment gasonics SNF 2009-02-25 21:09:00: Wafer chip Message-ID: While removing photoresist from bonded wafers,t one of the wafers had a small chip in it on removal from the machine. Bonding was apparently weak at the edge. The broken-off piece of wafer was in place and accounted for, but I am concerned that smaller splinters of wafer might be still in the machine. The machine seems to function normally. From cbaxter at snf.stanford.edu Thu Feb 26 17:44:54 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 26 Feb 2009 17:44:54 -0800 Subject: Comment gasonics SNF 2009-02-25 21:09:00: Wafer chip Message-ID: Removed wafer chip from the chamber.