Shutdown gasonics SNF 2009-02-20 00:38:15: system error won't reset

damodei at snf.stanford.edu damodei at snf.stanford.edu
Fri Feb 20 00:38:15 PST 2009


The output casette moved all the way up too early, leading to an "output casette full" error.  Start and stop buttons aren't responding, so can't abort or resume.  One wafer is still in the etch chamber. 




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