Shutdown gasonics SNF 2009-02-20 00:38:15: system error won't reset

damodei at damodei at
Fri Feb 20 00:38:15 PST 2009

The output casette moved all the way up too early, leading to an "output casette full" error.  Start and stop buttons aren't responding, so can't abort or resume.  One wafer is still in the etch chamber. 

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