Problem gasonics SNF 2009-02-20 00:43:37: system error won't reset

damodei at snf.stanford.edu damodei at snf.stanford.edu
Fri Feb 20 00:43:38 PST 2009


I shut down the system but my shutdown comment isn't showing up, so I'm duplicating it here:
output casette moved all the way up too early, leading to an "output casette full" error.  Neither start (resume) nor stop (abort) buttons is responding.  A wafer is still in the etch chamber.




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