From emyers at snf.stanford.edu  Wed Jan  7 09:50:24 2009
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 7 Jan 2009 09:50:24 -0800
Subject: Problem gasonics SNF 2009-01-07 09:50:23: Gas Flow1 Problem
Message-ID: <mailman.388.1356281733.3883.gasonics-pcs@snf.stanford.edu>

Gas flow1 problem has returned.  The following is what ceaser found the last time.  On service mode, set flow at 3slm(1.5vdc) checked input on gas pcb is at 0vdc. Power down the tool
and reseated j3 connector on pick and place pcb, flowed
o2 on service mode from 1 to 10 slm and o2 is flowing.
Cycled wafers w/out problem.



From eenriquez at snf.stanford.edu  Fri Jan  9 14:48:40 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 9 Jan 2009 14:48:40 -0800
Subject: Shutdown gasonics SNF 2009-01-09 14:48:40: Broken wafer inside chamber
Message-ID: <mailman.389.1356281733.3883.gasonics-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Jan  9 16:30:46 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 9 Jan 2009 16:30:46 -0800
Subject: Shutdown gasonics SNF 2009-01-09 14:48:40: Broken wafer inside chamber
Message-ID: <mailman.390.1356281733.3883.gasonics-pcs@snf.stanford.edu>

Vacuum broken wafer chips inside the chamber and
wiped down chamber with ipa.



From cbaxter at snf.stanford.edu  Fri Jan  9 16:36:11 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 9 Jan 2009 16:36:11 -0800
Subject: Problem gasonics SNF 2009-01-07 09:50:23: Gas Flow1 Problem
Message-ID: <mailman.391.1356281733.3883.gasonics-pcs@snf.stanford.edu>

Gas 1(o2) flow screen is low, with 3.0slm flow setpoint
the screen is only showing2.1slm and system would 
fault for gas 1 flow error.  I changed the output scaling
multiplier from 8150 to 8500 and cycled the tool w/out 
problem.



From yeh at snf.stanford.edu  Mon Jan 26 15:58:18 2009
From: yeh at snf.stanford.edu (yeh at snf.stanford.edu)
Date: Mon, 26 Jan 2009 15:58:18 -0800
Subject: Problem gasonics SNF 2009-01-26 15:58:18: gas 1 flow rate too low
Message-ID: <mailman.392.1356281733.3883.gasonics-pcs@snf.stanford.edu>

this error keeps coming up.



From yeh at snf.stanford.edu  Mon Jan 26 15:59:37 2009
From: yeh at snf.stanford.edu (yeh at snf.stanford.edu)
Date: Mon, 26 Jan 2009 15:59:37 -0800
Subject: Problem gasonics SNF 2009-01-26 15:59:37: "1amp 1 fails" error
Message-ID: <mailman.393.1356281733.3883.gasonics-pcs@snf.stanford.edu>

came up in recipe 013.  could not bypass with "start" button.  aborted resist strip.



From cbaxter at snf.stanford.edu  Mon Jan 26 18:04:42 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 26 Jan 2009 18:04:42 -0800
Subject: Problem gasonics SNF 2009-01-26 15:59:37: "1amp 1 fails" error
Message-ID: <mailman.394.1356281733.3883.gasonics-pcs@snf.stanford.edu>

Reset lamps breaker and tested each lamp one at the
time.



From cbaxter at snf.stanford.edu  Mon Jan 26 18:13:48 2009
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 26 Jan 2009 18:13:48 -0800
Subject: Problem gasonics SNF 2009-01-26 15:58:18: gas 1 flow rate too low
Message-ID: <mailman.395.1356281733.3883.gasonics-pcs@snf.stanford.edu>

Flowed O2 gas at 3.0 to 10 slm w/out problem.