From lwchang at snf.stanford.edu Sun Jul 5 14:09:45 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sun, 5 Jul 2009 14:09:45 -0700 Subject: Problem gasonics SNF 2009-07-05 14:09:44: gas1 low flow error. can't start processing Message-ID: From ludwig at snf.stanford.edu Tue Jul 7 17:11:58 2009 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Tue, 7 Jul 2009 17:11:58 -0700 Subject: Problem gasonics SNF 2009-07-07 17:11:57: Error, Door not closed Message-ID: cannot process wafers, "error- Door not closed" there is no wafer in the system From bchui at snf.stanford.edu Mon Jul 13 19:30:03 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 13 Jul 2009 19:30:03 -0700 Subject: Problem gasonics SNF 2009-07-13 19:30:02: RF error Message-ID: Frequently occurs during ashing. Once that occurs, machine won't automatically go on to the next wafer unless the user presses "START / RESUME" (i.e. I'll have to baby the machine throughout.) From cmcg at snf.stanford.edu Wed Jul 15 13:45:14 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 15 Jul 2009 13:45:14 -0700 Subject: Problem gasonics SNF 2009-07-15 13:45:13: Gas 1 flow rate low Message-ID: Got through 2 wafers with gas 1 flow rate fluctuating, occasionally giving errors. By the third wafer there was 0 flow for gas 1. From gth at snf.stanford.edu Sun Jul 19 12:32:29 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 19 Jul 2009 12:32:29 -0700 Subject: Problem gasonics SNF 2009-07-19 12:32:29: flowrate and pressure errors multiple times Message-ID: From alsune at snf.stanford.edu Mon Jul 20 01:29:18 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Mon, 20 Jul 2009 01:29:18 -0700 Subject: Shutdown gasonics SNF 2009-07-20 01:29:18: Wafer stuck inside the chamber Message-ID: printed out error message : Output cassette full and it won't respond to any keys. From eenriquez at snf.stanford.edu Mon Jul 20 08:38:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Jul 2009 08:38:33 -0700 Subject: Shutdown gasonics SNF 2009-07-20 01:29:18: Wafer stuck inside the chamber Message-ID: Reset the system. Ran 8 wafers with no problems. From cbaxter at snf.stanford.edu Thu Jul 23 19:16:51 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 23 Jul 2009 19:16:51 -0700 Subject: Problem gasonics SNF 2009-07-13 19:30:02: RF error Message-ID: Adjusted tuning slug. From cbaxter at snf.stanford.edu Thu Jul 23 19:17:24 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 23 Jul 2009 19:17:24 -0700 Subject: Problem gasonics SNF 2009-07-07 17:11:57: Error, Door not closed Message-ID: From tura at snf.stanford.edu Sun Jul 26 15:39:36 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Sun, 26 Jul 2009 15:39:36 -0700 Subject: Problem gasonics SNF 2009-07-26 15:39:35: RF Warning Message-ID: I got RF warning multiple times. From jrjain at snf.stanford.edu Wed Jul 29 21:58:14 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 29 Jul 2009 21:58:14 -0700 Subject: Problem gasonics SNF 2009-07-29 21:58:13: Receiver cassette fails to lower Message-ID: