Problem gasonics SNF 2009-07-13 19:30:02: RF error

bchui at snf.stanford.edu bchui at snf.stanford.edu
Mon Jul 13 19:30:03 PDT 2009


Frequently occurs during ashing.  Once that occurs, machine won't automatically go on to the next wafer unless the user presses "START / RESUME" (i.e. I'll have to baby the machine throughout.)




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