Problem gasonics SNF 2009-07-15 13:45:13: Gas 1 flow rate low

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Wed Jul 15 13:45:14 PDT 2009


Got through 2 wafers with gas 1 flow rate fluctuating, occasionally giving errors.  By the third wafer there was 0 flow for gas 1.	




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