Problem gasonics SNF 2009-07-19 12:32:29: flowrate and pressure errors multiple times
gth at snf.stanford.edu
gth at snf.stanford.edu
Sun Jul 19 12:32:29 PDT 2009
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Problem gasonics SNF 2009-07-15 13:45:13: Gas 1 flow rate low
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Shutdown gasonics SNF 2009-07-20 01:29:18: Wafer stuck inside the chamber
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Problem gasonics SNF 2009-07-15 13:45:13: Gas 1 flow rate low
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Shutdown gasonics SNF 2009-07-20 01:29:18: Wafer stuck inside the chamber
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