From eenriquez at snf.stanford.edu Wed Jun 3 06:32:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Jun 2009 06:32:11 -0700 Subject: Comment gasonics SNF 2009-04-02 16:54:53: Delay Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 3 08:05:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Jun 2009 08:05:20 -0700 Subject: Comment gasonics SNF 2009-05-29 16:43:14: wafer handler is at limit, may need readjust Message-ID: No problem found. Ran several wafers, pin clearance looks ok. From pponce at snf.stanford.edu Wed Jun 3 09:11:15 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Wed, 3 Jun 2009 09:11:15 -0700 Subject: Problem gasonics SNF 2009-06-03 09:11:15: gas1 flow rate was out of range Message-ID: that error flashed during HiLamp Strip From pponce at snf.stanford.edu Wed Jun 3 09:23:06 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Wed, 3 Jun 2009 09:23:06 -0700 Subject: Shutdown gasonics SNF 2009-06-03 09:23:06: Message-ID: From mdickey at snf.stanford.edu Wed Jun 3 11:09:01 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 3 Jun 2009 11:09:01 -0700 Subject: Shutdown gasonics SNF 2009-06-03 09:23:06: Message-ID: Could not duplicate error for gas 1. Ran 10 wafers with no problems, From tura at snf.stanford.edu Sun Jun 7 10:16:25 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Sun, 7 Jun 2009 10:16:25 -0700 Subject: Problem gasonics SNF 2009-06-07 10:16:25: gas1 flow rate low error Message-ID: I got the same error during main etch step. From emyers at snf.stanford.edu Mon Jun 8 10:29:58 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 8 Jun 2009 10:29:58 -0700 Subject: Problem gasonics SNF 2009-04-27 18:38:19: send cassette dirty Message-ID: Cleaned cassette From cbaxter at snf.stanford.edu Tue Jun 9 20:09:17 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 9 Jun 2009 20:09:17 -0700 Subject: Problem gasonics SNF 2009-06-07 10:16:25: gas1 flow rate low error Message-ID: From cbaxter at snf.stanford.edu Tue Jun 9 20:09:21 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 9 Jun 2009 20:09:21 -0700 Subject: Problem gasonics SNF 2009-06-03 09:11:15: gas1 flow rate was out of range Message-ID: From ericp at snf.stanford.edu Wed Jun 10 00:27:11 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 10 Jun 2009 00:27:11 -0700 Subject: Shutdown gasonics SNF 2009-06-10 00:27:10: unusable Message-ID: won't start even after power off. cassette full error. From cbaxter at snf.stanford.edu Wed Jun 10 17:14:08 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 10 Jun 2009 17:14:08 -0700 Subject: Comment gasonics SNF 2009-06-10 17:14:07: Other problem Message-ID: Beside the system unstable, the cooling fan is also bad, the motor is making a very loud noise. Need to change cooling fan. From cbaxter at snf.stanford.edu Thu Jun 11 16:38:57 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 11 Jun 2009 16:38:57 -0700 Subject: Comment gasonics SNF 2009-06-11 16:38:56: Blower Message-ID: A new fan blower is on ordered.. From cbaxter at snf.stanford.edu Wed Jun 17 16:48:00 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 17 Jun 2009 16:48:00 -0700 Subject: Comment gasonics SNF 2009-06-17 16:48:00: Update Message-ID: Blower was order, we're expecting it to arrive tomorrow. From cbaxter at snf.stanford.edu Thu Jun 18 20:25:13 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 18 Jun 2009 20:25:13 -0700 Subject: Shutdown gasonics SNF 2009-06-10 00:27:10: unusable Message-ID: Installed new blower and verified system config. I cycled the tool using 014 recipe w/out problem. The problem on the receiver module still not resolve. I will leave the front cover off for now, if the receiver elevator faulted DO NOT POWER DOWN THE TOOL, reset the pick and place controller pcb instead, on the left side ( switch#1). From cbaxter at snf.stanford.edu Thu Jun 18 20:25:19 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 18 Jun 2009 20:25:19 -0700 Subject: Comment gasonics SNF 2009-06-17 16:48:00: Update Message-ID: From cbaxter at snf.stanford.edu Thu Jun 18 20:25:22 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 18 Jun 2009 20:25:22 -0700 Subject: Comment gasonics SNF 2009-06-11 16:38:56: Blower Message-ID: From cbaxter at snf.stanford.edu Thu Jun 18 20:25:26 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 18 Jun 2009 20:25:26 -0700 Subject: Comment gasonics SNF 2009-06-10 17:14:07: Other problem Message-ID: From riteshj at snf.stanford.edu Thu Jun 18 20:42:50 2009 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Thu, 18 Jun 2009 20:42:50 -0700 Subject: Comment gasonics SNF 2009-06-18 20:42:50: cycled 8 wafers (rcp 014), works fine ! Message-ID: From gth at snf.stanford.edu Thu Jun 18 23:57:21 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 18 Jun 2009 23:57:21 -0700 Subject: Comment gasonics SNF 2009-06-18 23:57:20: input wafer empty message Message-ID: thanks Cesar for bringing up gasonics. after the load of 10 wafers got done nicely, it gave the input wafer carrier empty error message. not sure why ? I pushed the black push button as told to me by a previous user. From tura at snf.stanford.edu Fri Jun 19 11:48:26 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Fri, 19 Jun 2009 11:48:26 -0700 Subject: Problem gasonics SNF 2009-06-19 11:48:26: RF Error Message-ID: I ran 0166, for a couple of wafers (out of 12) about 100sec into the recipe it gave "RF Warning" and stalled. Pressing Start cleared the error and it moved on. Photoresist seems to be gone at the end of the strip. From riteshj at snf.stanford.edu Sat Jun 20 11:09:31 2009 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Sat, 20 Jun 2009 11:09:31 -0700 Subject: Problem gasonics SNF 2009-06-20 11:09:31: gas 1 flow low error Message-ID: the gas one flow fluctuates in the readout and error: gas 1 flow too low. THe reading fluctuates during the etch. PR gets removed though. From cbaxter at snf.stanford.edu Sat Jun 20 15:18:36 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 20 Jun 2009 15:18:36 -0700 Subject: Problem gasonics SNF 2009-06-19 11:48:26: RF Error Message-ID: From cbaxter at snf.stanford.edu Sat Jun 20 15:19:51 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 20 Jun 2009 15:19:51 -0700 Subject: Problem gasonics SNF 2009-06-20 11:09:31: gas 1 flow low error Message-ID: i run 014 recipe and o2 gas is stable. possible the mfc is going bad. From cbaxter at snf.stanford.edu Sat Jun 20 15:21:46 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 20 Jun 2009 15:21:46 -0700 Subject: Problem gasonics SNF 2009-06-20 15:21:45: Receiver elevator Message-ID: Still working on getting a new receiver elevator module. From cbaxter at snf.stanford.edu Sun Jun 21 09:12:23 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 21 Jun 2009 09:12:23 -0700 Subject: Comment gasonics SNF 2009-06-18 23:57:20: input wafer empty message Message-ID: From king at snf.stanford.edu Mon Jun 22 18:51:59 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 22 Jun 2009 18:51:59 -0700 Subject: Shutdown gasonics SNF 2009-06-22 18:51:58: front cover is off. Message-ID: From cbaxter at snf.stanford.edu Mon Jun 22 20:12:59 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 22 Jun 2009 20:12:59 -0700 Subject: Shutdown gasonics SNF 2009-06-22 18:51:58: front cover is off. Message-ID: Left front off for now. From rparsa at snf.stanford.edu Thu Jun 25 15:29:17 2009 From: rparsa at snf.stanford.edu (rparsa at snf.stanford.edu) Date: Thu, 25 Jun 2009 15:29:17 -0700 Subject: Shutdown gasonics SNF 2009-06-25 15:29:17: Message-ID: From cbaxter at snf.stanford.edu Thu Jun 25 16:39:52 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 25 Jun 2009 16:39:52 -0700 Subject: Shutdown gasonics SNF 2009-06-25 15:29:17: Message-ID: Reset the pick and place pcb and unload wafer.. From riteshj at snf.stanford.edu Tue Jun 30 18:58:53 2009 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Tue, 30 Jun 2009 18:58:53 -0700 Subject: Problem gasonics SNF 2009-06-30 18:58:52: gas 1 flow error again Message-ID: ran 7 wafers and the error popped up intermittently. The flow gauge was fluctuating.