Problem gasonics SNF 2009-06-03 09:11:15: gas1 flow rate was out of range
pponce at snf.stanford.edu
pponce at snf.stanford.edu
Wed Jun 3 09:11:15 PDT 2009
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Comment gasonics SNF 2009-05-29 16:43:14: wafer handler is at limit, may need readjust
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Problem gasonics SNF 2009-06-03 09:11:15: gas1 flow rate was out of range
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that error flashed during HiLamp Strip
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Comment gasonics SNF 2009-05-29 16:43:14: wafer handler is at limit, may need readjust
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Problem gasonics SNF 2009-06-03 09:11:15: gas1 flow rate was out of range
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