Problem gasonics SNF 2009-06-07 10:16:25: gas1 flow rate low error
tura at snf.stanford.edu
tura at snf.stanford.edu
Sun Jun 7 10:16:25 PDT 2009
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Problem gasonics SNF 2009-06-07 10:16:25: gas1 flow rate low error
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I got the same error during main etch step.
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Problem gasonics SNF 2009-06-07 10:16:25: gas1 flow rate low error
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