Problem gasonics SNF 2009-06-19 11:48:26: RF Error

tura at snf.stanford.edu tura at snf.stanford.edu
Fri Jun 19 11:48:26 PDT 2009


I ran 0166, for a couple of wafers (out of 12) about 100sec into the recipe it gave  "RF Warning" and stalled. Pressing Start cleared the error and it moved on. Photoresist seems to be gone at the end of the strip.




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