Problem gasonics SNF 2009-06-20 11:09:31: gas 1 flow low error

riteshj at snf.stanford.edu riteshj at snf.stanford.edu
Sat Jun 20 11:09:31 PDT 2009


the gas one flow fluctuates in the readout and error: gas 1 flow too low. THe reading fluctuates during the etch. PR gets removed though.




More information about the gasonics-pcs mailing list