Problem gasonics SNF 2009-06-20 11:09:31: gas 1 flow low error

riteshj at snf.stanford.edu riteshj at snf.stanford.edu
Sat Jun 20 11:09:31 PDT 2009

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the gas one flow fluctuates in the readout and error: gas 1 flow too low. THe reading fluctuates during the etch. PR gets removed though.

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