Problem gasonics SNF 2009-06-20 11:09:31: gas 1 flow low error

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sat Jun 20 15:19:51 PDT 2009


i run 014 recipe and o2 gas is stable. possible the mfc is
going bad.




More information about the gasonics-pcs mailing list