From panjun at snf.stanford.edu Mon Mar 2 16:33:21 2009 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Mon, 2 Mar 2009 16:33:21 -0800 Subject: Comment gasonics SNF 2009-03-02 16:33:21: wafer broken during unloading Message-ID: removed the broken pieces in the reachable places, not able to remove them in the bottom. From cbaxter at snf.stanford.edu Tue Mar 3 15:23:55 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Mar 2009 15:23:55 -0800 Subject: Comment gasonics SNF 2009-03-02 16:33:21: wafer broken during unloading Message-ID: Vacuumed broken wafer chips inside the chamber . From cbaxter at snf.stanford.edu Tue Mar 3 15:24:02 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Mar 2009 15:24:02 -0800 Subject: Problem gasonics SNF 2009-02-18 15:39:03: 0 Message-ID: From yeh at snf.stanford.edu Wed Mar 4 19:51:38 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 4 Mar 2009 19:51:38 -0800 Subject: Problem gasonics SNF 2009-03-04 19:51:37: wafer handling problems Message-ID: out of 4 wafers, 2 wafers were dropped as it came out. one of the 2 dropped wafers was crushed by moving parts. high risk tool! From cbaxter at snf.stanford.edu Wed Mar 4 21:35:50 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Mar 2009 21:35:50 -0800 Subject: Problem gasonics SNF 2009-03-04 19:51:37: wafer handling problems Message-ID: Adjusted unload arm pick up and tighten lose screw on nest finger. From slcheng at snf.stanford.edu Wed Mar 11 11:35:51 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 11 Mar 2009 11:35:51 -0700 Subject: Shutdown gasonics SNF 2009-03-11 11:35:51: broken wafers Message-ID: the wafer was broken during the transfering. i still have one wafer inside From eenriquez at snf.stanford.edu Wed Mar 11 17:23:59 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Mar 2009 17:23:59 -0700 Subject: Shutdown gasonics SNF 2009-03-11 11:35:51: broken wafers Message-ID: Vacuum broken wafer pieces and cycled wafer From grahamab at snf.stanford.edu Wed Mar 11 18:13:09 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 11 Mar 2009 18:13:09 -0700 Subject: Comment gasonics SNF 2009-03-11 18:13:09: Lamp 1 Fails Message-ID: This error shows up during warmup. The process still runs after pressing start, but I'm not sure if the heating lamp is on. From lwchang at snf.stanford.edu Wed Mar 11 18:52:07 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Wed, 11 Mar 2009 18:52:07 -0700 Subject: Problem gasonics SNF 2009-03-11 18:52:06: lamp 1 fail had to abort the process Message-ID: From filip at snf.stanford.edu Thu Mar 12 09:28:18 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 12 Mar 2009 09:28:18 -0700 Subject: Shutdown gasonics SNF 2009-03-12 09:28:18: lamp 1 fails Message-ID: cannot complete any recipes From eenriquez at snf.stanford.edu Fri Mar 13 10:11:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Mar 2009 10:11:38 -0700 Subject: Shutdown gasonics SNF 2009-03-12 09:28:18: lamp 1 fails Message-ID: Cleaned connector to main wire harness. Ran 42 wafers using recipe 13 with no problems. From eenriquez at snf.stanford.edu Fri Mar 13 10:11:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Mar 2009 10:11:49 -0700 Subject: Problem gasonics SNF 2009-03-11 18:52:06: lamp 1 fail had to abort the process Message-ID: Cleaned connector to main wire harness. Ran 42 wafers using recipe 13 with no problems. From eenriquez at snf.stanford.edu Fri Mar 13 10:11:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Mar 2009 10:11:57 -0700 Subject: Comment gasonics SNF 2009-03-11 18:13:09: Lamp 1 Fails Message-ID: Cleaned connector to main wire harness. Ran 42 wafers using recipe 13 with no problems. From huigensr at snf.stanford.edu Wed Mar 18 19:47:01 2009 From: huigensr at snf.stanford.edu (huigensr at snf.stanford.edu) Date: Wed, 18 Mar 2009 19:47:01 -0700 Subject: Problem gasonics SNF 2009-03-18 19:47:00: Wafer Handler error Message-ID: this seems to be happening a lot lately. The wafer handler broke two wafers last week and this evening, it placed the wafer crooked on the 3-prong chuck...somehow the system errored out without dropping my wafer, but the handler is now blocking the chuck, preventing the door from closing. I would red-light the machine, except it's the evening and perhaps somebody needs the tool and can fix it. From cbaxter at snf.stanford.edu Wed Mar 18 22:01:15 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Mar 2009 22:01:15 -0700 Subject: Problem gasonics SNF 2009-03-18 19:47:00: Wafer Handler error Message-ID: Cleared error and cycled wafer w/out problem. From ludwig at snf.stanford.edu Mon Mar 23 20:04:46 2009 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Mon, 23 Mar 2009 20:04:46 -0700 Subject: Problem gasonics SNF 2009-03-23 20:04:45: Open chamber door Message-ID: processed first wafer, on the second one, the chamber door did not close. From ludwig at snf.stanford.edu Mon Mar 23 20:06:10 2009 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Mon, 23 Mar 2009 20:06:10 -0700 Subject: Shutdown gasonics SNF 2009-03-23 20:06:10: Chamber door open Message-ID: The chamber door does not close From eenriquez at snf.stanford.edu Tue Mar 24 10:22:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Mar 2009 10:22:48 -0700 Subject: Shutdown gasonics SNF 2009-03-23 20:06:10: Chamber door open Message-ID: Found a wafer chip on the door close sensor. Removed the chip and reset the system. Cycled 20 wafers with no problems. From eenriquez at snf.stanford.edu Tue Mar 24 10:22:53 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Mar 2009 10:22:53 -0700 Subject: Problem gasonics SNF 2009-03-23 20:04:45: Open chamber door Message-ID: Found a wafer chip on the door close sensor. Removed the chip and reset the system. Cycled 20 wafers with no problems. From damodei at snf.stanford.edu Tue Mar 24 22:38:03 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Tue, 24 Mar 2009 22:38:03 -0700 Subject: Problem gasonics SNF 2009-03-24 22:38:02: System ate wafer Message-ID: Processed 6 wafers fine, but 7th wouldn't unload and machine froze when arm tried to unload it. Can't see wafer in chamber, perhaps it fell. From eenriquez at snf.stanford.edu Wed Mar 25 12:55:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Mar 2009 12:55:57 -0700 Subject: Problem gasonics SNF 2009-03-24 22:38:02: System ate wafer Message-ID: Did not find any wafer on the system. Ran 16 wafers using recipe 42 with no problems. From bchui at snf.stanford.edu Thu Mar 26 18:33:48 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 26 Mar 2009 18:33:48 -0700 Subject: Problem gasonics SNF 2009-03-26 18:33:48: wafer chipped Message-ID: I couldn't find the (small) missing piece--don't know if it is still inside the chamber or fell from the loading arm after exiting the chamber. From cbaxter at snf.stanford.edu Thu Mar 26 19:42:23 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 26 Mar 2009 19:42:23 -0700 Subject: Problem gasonics SNF 2009-03-26 18:33:48: wafer chipped Message-ID: Checked inside the chamber and did not see any wafewr chips or outside the chamber..