Problem gasonics SNF 2009-03-04 19:51:37: wafer handling problems

yeh at yeh at
Wed Mar 4 19:51:38 PST 2009

out of 4 wafers, 2 wafers were dropped as it came out.  one of the 2 dropped wafers was crushed by moving parts.  high risk tool!

More information about the gasonics-pcs mailing list