Problem gasonics SNF 2009-03-04 19:51:37: wafer handling problems

yeh at snf.stanford.edu yeh at snf.stanford.edu
Wed Mar 4 19:51:38 PST 2009


out of 4 wafers, 2 wafers were dropped as it came out.  one of the 2 dropped wafers was crushed by moving parts.  high risk tool!




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