Problem gasonics SNF 2009-03-11 18:52:06: lamp 1 fail had to abort the process

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Mar 13 10:11:49 PDT 2009


Cleaned connector to main wire harness.  Ran 42 wafers using recipe 13 with no problems.




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