Comment gasonics SNF 2009-03-11 18:13:09: Lamp 1 Fails

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Mar 13 10:11:57 PDT 2009


Cleaned connector to main wire harness.  Ran 42 wafers using recipe 13 with no problems.




More information about the gasonics-pcs mailing list