Problem gasonics SNF 2009-03-18 19:47:00: Wafer Handler error
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Wed Mar 18 22:01:15 PDT 2009
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Problem gasonics SNF 2009-03-18 19:47:00: Wafer Handler error
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Cleared error and cycled wafer w/out problem.
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Problem gasonics SNF 2009-03-18 19:47:00: Wafer Handler error
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Problem gasonics SNF 2009-03-23 20:04:45: Open chamber door
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