Shutdown gasonics SNF 2009-03-23 20:06:10: Chamber door open

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 24 10:22:48 PDT 2009


Found a wafer chip on the door close sensor.  Removed the chip and reset the system.  Cycled 20 wafers with no problems.




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