Problem gasonics SNF 2009-03-24 22:38:02: System ate wafer

damodei at snf.stanford.edu damodei at snf.stanford.edu
Tue Mar 24 22:38:03 PDT 2009


Processed 6 wafers fine, but 7th wouldn't unload and machine froze when arm tried to unload it.  Can't see wafer in chamber, perhaps it fell.




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