From cursive at snf.stanford.edu Fri Nov 6 08:18:39 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 6 Nov 2009 08:18:39 -0800 Subject: Shutdown gasonics SNF 2009-11-06 08:18:38: error #4: output cassette full Message-ID: The output cassette is not full, but it shows the error message. my wafer is stuck inside the chamber. From eenriquez at snf.stanford.edu Fri Nov 6 09:01:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Nov 2009 09:01:35 -0800 Subject: Shutdown gasonics SNF 2009-11-06 08:18:38: error #4: output cassette full Message-ID: Reset the system. Ran wafers with no problems. From eenriquez at snf.stanford.edu Mon Nov 9 07:54:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Nov 2009 07:54:39 -0800 Subject: Shutdown gasonics SNF 2009-11-09 07:54:38: Working on receiver indexer Message-ID: Replacing indexer motor. From eenriquez at snf.stanford.edu Mon Nov 9 14:49:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Nov 2009 14:49:13 -0800 Subject: Shutdown gasonics SNF 2009-11-09 07:54:38: Working on receiver indexer Message-ID: Did not install the new motor. Found the sensor flag may have been dragging on the photo sensor. Realigned the flag and re-assembled. Ran 20 wafers without a problem. Exercised the receiver indexer 10X without a failure. We will continue to monitor the intermittent indexer problem. From eenriquez at snf.stanford.edu Wed Nov 18 17:23:36 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 17:23:36 -0800 Subject: Comment gasonics SNF 2009-09-30 18:07:54: Occasional wafer handling errors Message-ID: Archived From eenriquez at snf.stanford.edu Wed Nov 18 17:23:46 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 17:23:46 -0800 Subject: Comment gasonics SNF 2009-10-15 23:56:50: no handling errors Message-ID: Archived From ericp at snf.stanford.edu Mon Nov 23 02:33:44 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 23 Nov 2009 02:33:44 -0800 Subject: Problem gasonics SNF 2009-11-23 02:33:42: Gas 1 flow too low error Message-ID: Gives this error about 10-15 sec into the run. Gas 1 looks stable at first, then drops to zero or becomes erratic. From eenriquez at snf.stanford.edu Tue Nov 24 11:26:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Nov 2009 11:26:22 -0800 Subject: Problem gasonics SNF 2009-10-19 22:45:30: Receiving cassette Message-ID: Problem has not re-occured in over 3 weeks after we adjusted the indexer rotation sensor flag. From eenriquez at snf.stanford.edu Tue Nov 24 11:31:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Nov 2009 11:31:52 -0800 Subject: Comment gasonics SNF 2009-10-26 21:08:09: RF error when running 0144 Message-ID: This problem has not re-occured in over 3 weeks. Ran 15 wafers using recipe 1 with no problems. From eenriquez at snf.stanford.edu Tue Nov 24 11:34:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Nov 2009 11:34:44 -0800 Subject: Problem gasonics SNF 2009-11-23 02:33:42: Gas 1 flow too low error Message-ID: Increased the inlet O2 pressure. Ran 15 wafers using recipe 1 with no problems. Sending out an MFC for calibration in case we need to replace it. From eenriquez at snf.stanford.edu Tue Nov 24 11:36:24 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Nov 2009 11:36:24 -0800 Subject: Problem gasonics SNF 2009-06-20 15:21:45: Receiver elevator Message-ID: Problem has not re-occured in over 3 weeks after we adjusted the indexer rotation sensor flag. From eenriquez at snf.stanford.edu Tue Nov 24 11:36:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Nov 2009 11:36:32 -0800 Subject: Problem gasonics SNF 2009-04-02 12:14:48: Intermittent cassette indexer problem Message-ID: Problem has not re-occured in over 3 weeks after we adjusted the indexer rotation sensor flag. From eenriquez at snf.stanford.edu Tue Nov 24 11:36:59 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Nov 2009 11:36:59 -0800 Subject: Problem gasonics SNF 2009-07-19 12:32:29: flowrate and pressure errors multiple times Message-ID: Increase inlet O2 pressure.