Shutdown gasonics SNF 2009-11-06 08:18:38: error #4: output cassette full
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Nov 6 09:01:35 PST 2009
Reset the system. Ran wafers with no problems.
More information about the gasonics-pcs
mailing list