Shutdown gasonics SNF 2009-11-09 07:54:38: Working on receiver indexer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 9 14:49:13 PST 2009


Did not install the  new motor.  Found the sensor flag may have been dragging on the photo sensor.  Realigned the flag and re-assembled.  Ran 20 wafers without a problem.  Exercised the receiver indexer  10X without a failure.  We will continue to monitor the intermittent indexer problem.




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