Comment gasonics SNF 2009-10-26 21:08:09: RF error when running 0144

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Nov 24 11:31:52 PST 2009


This problem has not re-occured in over 3 weeks.  Ran 15 wafers using recipe 1 with no problems.




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