Problem gasonics SNF 2009-11-23 02:33:42: Gas 1 flow too low error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Nov 24 11:34:44 PST 2009


Increased the inlet O2 pressure. Ran 15 wafers using recipe 1 with no problems.  Sending out an MFC for calibration in case we need to replace it.




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