Problem gasonics SNF 2009-10-25 21:03:17: Wafer not unloading automatically

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Oct 26 14:44:57 PDT 2009


One of the wafer tray pins was bent up.  Straightened the pin and cycled wafers with no problems.




More information about the gasonics-pcs mailing list