Shutdown gasonics SNF 2009-10-26 02:26:36: bad receiver and sender assembly.

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Oct 26 14:45:02 PDT 2009


One of the wafer tray pins was bent up.  Straightened the pin and cycled wafers with no problems.




More information about the gasonics-pcs mailing list