Comment gasonics SNF 2009-10-26 21:08:09: RF error when running 0144

damodei at snf.stanford.edu damodei at snf.stanford.edu
Mon Oct 26 21:08:11 PDT 2009

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"RF error" shows up intermittently (maybe 1 out of every 2 wafers) when running recipe 0144.

Previous message: Shutdown gasonics SNF 2009-10-26 02:26:36: bad receiver and sender assembly.
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