From quickwin at snf.stanford.edu  Thu Sep 24 07:19:51 2009
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Thu, 24 Sep 2009 07:19:51 -0700
Subject: Shutdown gasonics SNF 2009-09-24 07:19:50: loss of wafer arm vacuum
Message-ID: <mailman.513.1356281734.3883.gasonics-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Thu Sep 24 14:38:47 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 24 Sep 2009 14:38:47 -0700
Subject: Shutdown gasonics SNF 2009-09-24 07:19:50: loss of wafer arm vacuum
Message-ID: <mailman.514.1356281734.3883.gasonics-pcs@snf.stanford.edu>

Load arm lift cylinder air line had a restriction which did not allow the arm to fully raise.  Replaced the air line.



From mtan at snf.stanford.edu  Fri Sep 25 09:10:27 2009
From: mtan at snf.stanford.edu (mtan at snf.stanford.edu)
Date: Fri, 25 Sep 2009 09:10:27 -0700
Subject: Problem gasonics SNF 2009-09-25 09:10:26: cannot load wafers
Message-ID: <mailman.515.1356281734.3883.gasonics-pcs@snf.stanford.edu>




From king at snf.stanford.edu  Wed Sep 30 18:07:54 2009
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Wed, 30 Sep 2009 18:07:54 -0700
Subject: Comment gasonics SNF 2009-09-30 18:07:54: Occasional wafer handling errors
Message-ID: <mailman.516.1356281734.3883.gasonics-pcs@snf.stanford.edu>

It may have an issue with the way the wafer sits on the chuck/holder.