From bdai at snf.stanford.edu Mon Apr 5 20:33:36 2010 From: bdai at snf.stanford.edu (bdai at snf.stanford.edu) Date: Mon, 5 Apr 2010 20:33:36 -0700 Subject: Problem gasonics SNF 2010-04-05 20:33:36: robot arm cannot load in wafers Message-ID: It is not working after several attempts From king at snf.stanford.edu Mon Apr 5 20:54:56 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 5 Apr 2010 20:54:56 -0700 Subject: Problem gasonics SNF 2010-04-05 20:54:56: Not working for me either Message-ID: From jjeong1 at snf.stanford.edu Mon Apr 5 23:25:59 2010 From: jjeong1 at snf.stanford.edu (jjeong1 at snf.stanford.edu) Date: Mon, 5 Apr 2010 23:25:59 -0700 Subject: Problem gasonics SNF 2010-04-05 23:25:59: load arm cannot acquire a wafer Message-ID: From mdickey at snf.stanford.edu Tue Apr 6 08:17:07 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 6 Apr 2010 08:17:07 -0700 Subject: Comment gasonics SNF 2010-04-06 08:17:07: Air pressure? Message-ID: Turned up the air pressure and it seems to have helped. Not sure if this is the true fix. Ran 10 wafers without a problem. This problem seems to be intermittent. From king at snf.stanford.edu Wed Apr 7 23:44:25 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 7 Apr 2010 23:44:25 -0700 Subject: Comment gasonics SNF 2010-04-07 23:44:24: worked OK for me, thank you. Message-ID: From ksaruta at snf.stanford.edu Sun Apr 11 16:08:05 2010 From: ksaruta at snf.stanford.edu (ksaruta at snf.stanford.edu) Date: Sun, 11 Apr 2010 16:08:05 -0700 Subject: Shutdown gasonics SNF 2010-04-11 16:08:04: Error: Output cassette full Message-ID: This error is shown on the display and any buttons don't work. one wafer is in the chamber. From eenriquez at snf.stanford.edu Mon Apr 12 09:21:32 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Apr 2010 09:21:32 -0700 Subject: Shutdown gasonics SNF 2010-04-11 16:08:04: Error: Output cassette full Message-ID: Reset the system, adjusted the output arm speed. Cycled 25 wafers without any problems. From cursive at snf.stanford.edu Tue Apr 20 07:57:45 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 20 Apr 2010 07:57:45 -0700 Subject: Problem gasonics SNF 2010-04-20 07:57:44: arm doesn't work well Message-ID: arm doesn't work well, and need to pull up the arm by hand. From eenriquez at snf.stanford.edu Tue Apr 20 10:34:48 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Apr 2010 10:34:48 -0700 Subject: Problem gasonics SNF 2010-04-20 07:57:44: arm doesn't work well Message-ID: Adjusted the arm air pressure. Ran 25 wafers with no problems. From shuluc at snf.stanford.edu Tue Apr 20 16:39:00 2010 From: shuluc at snf.stanford.edu (shuluc at snf.stanford.edu) Date: Tue, 20 Apr 2010 16:39:00 -0700 Subject: Shutdown gasonics SNF 2010-04-20 16:38:59: door can't close Message-ID: Can't unload wafer by the vaccum. Door can't be close From eenriquez at snf.stanford.edu Wed Apr 21 10:20:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Apr 2010 10:20:16 -0700 Subject: Comment gasonics SNF 2010-04-06 08:17:07: Air pressure? Message-ID: Archived From eenriquez at snf.stanford.edu Wed Apr 21 10:39:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Apr 2010 10:39:49 -0700 Subject: Shutdown gasonics SNF 2010-04-20 16:38:59: door can't close Message-ID: Reset the system. Found the pneumatic line to the unload arm had a kink. Cut the kinked section and adjusted the metering valve. Cycled 40 wafers with no problems.