From eenriquez at snf.stanford.edu Mon Aug 2 09:18:52 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Aug 2010 09:18:52 -0700 Subject: Comment gasonics SNF 2010-07-29 09:19:28: Tested OK after power outtage Message-ID: Archived From chienyuc at snf.stanford.edu Thu Aug 5 17:32:53 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Thu, 5 Aug 2010 17:32:53 -0700 Subject: Problem gasonics SNF 2010-08-05 17:32:53: Loading arm not fully up Message-ID: Intermittent problem. Have to manually raise the arm and press START to resume process. From cursive at snf.stanford.edu Fri Aug 6 11:46:59 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 6 Aug 2010 11:46:59 -0700 Subject: Problem gasonics SNF 2010-08-06 11:46:58: exit arm has problem to send finished wafers Message-ID: when sending the wafers, wafer can't fit the cassete well... Be careful of your wafers... From mtan at snf.stanford.edu Sat Aug 7 11:29:52 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sat, 7 Aug 2010 11:29:52 -0700 Subject: Problem gasonics SNF 2010-08-07 11:29:51: arm not laoding properly. Door won't close Message-ID: From rik at snf.stanford.edu Sun Aug 8 12:11:28 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Sun, 8 Aug 2010 12:11:28 -0700 Subject: Problem gasonics SNF 2010-08-08 12:11:28: Wafer stuck in chamber Message-ID: Keeps giving an output cassette full error. Tried to reset the system a few times without any luck. From raneeyoo at snf.stanford.edu Sun Aug 8 18:18:53 2010 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sun, 8 Aug 2010 18:18:53 -0700 Subject: Comment gasonics SNF 2010-08-08 18:18:52: robert arm dropped wafer Message-ID: robert arm dropped a wafer. Please check it. thanks. From raneeyoo at snf.stanford.edu Sun Aug 8 19:05:45 2010 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sun, 8 Aug 2010 19:05:45 -0700 Subject: Problem gasonics SNF 2010-08-08 19:05:44: unload arm lost vacuum and drop a wafer Message-ID: robert arm dropped a wafer and the wafer was broken. Eric helped to clean the broken wafer. I did a test run with a dummy wafer. During unloading step, "unload arm lost vacuum" message came out, the arm hit and dropped the wafer again. Please check it. thanks. From eenriquez at snf.stanford.edu Mon Aug 9 08:10:00 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Aug 2010 08:10:00 -0700 Subject: Comment gasonics SNF 2010-08-09 08:10:00: Update Message-ID: The unload arm is way, way out of adjustment. It knock the wafer out when it goes out to get the wafer and it trys to place the wafer in between slots when it unloads it into the cassette. Need to adjust unload arm alignment. From cbaxter at snf.stanford.edu Mon Aug 9 12:20:19 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:20:19 -0700 Subject: Problem gasonics SNF 2010-08-08 19:05:44: unload arm lost vacuum and drop a wafer Message-ID: Adjusted unload arm and also repaired air for unload arm up. From cbaxter at snf.stanford.edu Mon Aug 9 12:20:25 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:20:25 -0700 Subject: Problem gasonics SNF 2010-08-08 12:11:28: Wafer stuck in chamber Message-ID: From cbaxter at snf.stanford.edu Mon Aug 9 12:20:38 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:20:38 -0700 Subject: Problem gasonics SNF 2010-08-07 11:29:51: arm not laoding properly. Door won't close Message-ID: From cbaxter at snf.stanford.edu Mon Aug 9 12:20:46 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:20:46 -0700 Subject: Problem gasonics SNF 2010-08-06 11:46:58: exit arm has problem to send finished wafers Message-ID: From cbaxter at snf.stanford.edu Mon Aug 9 12:20:52 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:20:52 -0700 Subject: Problem gasonics SNF 2010-08-05 17:32:53: Loading arm not fully up Message-ID: From cbaxter at snf.stanford.edu Mon Aug 9 12:20:58 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:20:58 -0700 Subject: Problem gasonics SNF 2010-06-16 19:15:13: output casset full error Message-ID: From cbaxter at snf.stanford.edu Mon Aug 9 12:21:01 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:21:01 -0700 Subject: Problem gasonics SNF 2010-05-31 21:31:50: Still has O/P cassette full errors Message-ID: From cbaxter at snf.stanford.edu Mon Aug 9 12:21:07 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:21:07 -0700 Subject: Problem gasonics SNF 2010-05-27 22:03:06: output cassette full error Message-ID: From cbaxter at snf.stanford.edu Mon Aug 9 12:21:12 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:21:12 -0700 Subject: Problem gasonics SNF 2010-05-18 06:24:19: output cassette full Message-ID: From cbaxter at snf.stanford.edu Mon Aug 9 12:21:19 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2010 12:21:19 -0700 Subject: Problem gasonics SNF 2010-05-17 22:27:02: Error: receiving cassette full Message-ID: From eenriquez at snf.stanford.edu Thu Aug 12 10:38:14 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Aug 2010 10:38:14 -0700 Subject: Comment gasonics SNF 2010-08-09 08:10:00: Update Message-ID: Cesar re-leveled the unload arm and adjusted the chamber pins. From haemmerl at snf.stanford.edu Thu Aug 19 18:58:33 2010 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Thu, 19 Aug 2010 18:58:33 -0700 Subject: Shutdown gasonics SNF 2010-08-19 18:58:32: Wafer stuck in the chamber Message-ID: From mtang at snf.stanford.edu Thu Aug 19 19:50:28 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 19 Aug 2010 19:50:28 -0700 Subject: Shutdown gasonics SNF 2010-08-19 18:58:32: Wafer stuck in the chamber Message-ID: Dongrip will try to retrieve the wafer - and will shutdown or comment depending on his success. From dongrip at snf.stanford.edu Thu Aug 19 20:38:28 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 19 Aug 2010 20:38:28 -0700 Subject: Comment gasonics SNF 2010-08-19 20:38:27: output cassette full error Message-ID: The previous user shut down gasonics because his wafer was stuck in the chamber due to the ouput cassette full error. I asked Mary to make the machine up, and took his wafer out of the chamber. The temporal solution for the ouput cassette full error is to shake the vertical board on the output cassette side very gently and very slightly. While doing that, press start button. The problem may come from bad connection of the sensing board. I didn't encounter any problems during my 5 wafers running. From eenriquez at snf.stanford.edu Fri Aug 20 10:46:55 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Aug 2010 10:46:55 -0700 Subject: Comment gasonics SNF 2010-08-19 20:38:27: output cassette full error Message-ID: Cycled 50 wafers with no problems. If the "output cassette full" error re-occurs, power the system Off and then back ON to reset. There is no need to jiggle the vertical board. From eenriquez at snf.stanford.edu Tue Aug 24 13:42:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Aug 2010 13:42:30 -0700 Subject: Comment gasonics SNF 2010-08-08 18:18:52: robert arm dropped wafer Message-ID: Realigned unload arm and the wafer holder. From jwpchen at snf.stanford.edu Fri Aug 27 05:35:46 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 27 Aug 2010 05:35:46 -0700 Subject: Comment gasonics SNF 2010-08-27 05:35:46: chunks and stuff in chamber Message-ID: i lost four 2mm chiplets in chamber... then peeked inside with a flashlight and found a zoo in there. silicon is a new lifeform. From cfchiang at snf.stanford.edu Mon Aug 30 21:09:50 2010 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Mon, 30 Aug 2010 21:09:50 -0700 Subject: Problem gasonics SNF 2010-08-30 21:09:48: wafer handeling problems Message-ID: When gasonics was taking one wafer out of the furnace and attempting to place another one in it didn't slot the outgoing wafer, dropping it. Because of this the incoming wafer also dropped. When the dropped incoming wafer was rerun, it had to be nudged with tweezers into the correct position on the way into the furnace, and wasn't picked up correctly after exiting the furnace. From eenriquez at snf.stanford.edu Tue Aug 31 11:50:53 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Aug 2010 11:50:53 -0700 Subject: Comment gasonics SNF 2010-08-27 05:35:46: chunks and stuff in chamber Message-ID: Wet cleaned the chamber From eenriquez at snf.stanford.edu Tue Aug 31 11:52:27 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Aug 2010 11:52:27 -0700 Subject: Problem gasonics SNF 2010-08-30 21:09:48: wafer handeling problems Message-ID: Adjusted the unload arm guides. Also adjusted the load arm position. Cycled about 60 wafers with no problems.