Problem gasonics SNF 2010-08-07 11:29:51: arm not laoding properly. Door won't close
mtan at snf.stanford.edu
mtan at snf.stanford.edu
Sat Aug 7 11:29:52 PDT 2010
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Problem gasonics SNF 2010-08-06 11:46:58: exit arm has problem to send finished wafers
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Problem gasonics SNF 2010-08-07 11:29:51: arm not laoding properly. Door won't close
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Problem gasonics SNF 2010-08-07 11:29:51: arm not laoding properly. Door won't close
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