Problem gasonics SNF 2010-08-08 12:11:28: Wafer stuck in chamber

rik at snf.stanford.edu rik at snf.stanford.edu
Sun Aug 8 12:11:28 PDT 2010

Previous message: Problem gasonics SNF 2010-08-07 11:29:51: arm not laoding properly. Door won't close
Next message: Problem gasonics SNF 2010-08-08 12:11:28: Wafer stuck in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Keeps giving an output cassette full error. Tried to reset the system a few times without any luck.

Previous message: Problem gasonics SNF 2010-08-07 11:29:51: arm not laoding properly. Door won't close
Next message: Problem gasonics SNF 2010-08-08 12:11:28: Wafer stuck in chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the gasonics-pcs mailing list