Problem gasonics SNF 2010-08-08 19:05:44: unload arm lost vacuum and drop a wafer

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Sun Aug 8 19:05:45 PDT 2010


robert arm dropped a wafer and the wafer was broken.
Eric helped to clean the broken wafer.
I did a test run with a dummy wafer.  During unloading step, "unload arm lost vacuum" message came out, the arm hit and dropped the wafer again.
Please check it.
thanks.




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