Problem gasonics SNF 2010-08-05 17:32:53: Loading arm not fully up
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Aug 9 12:20:52 PDT 2010
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Problem gasonics SNF 2010-08-05 17:32:53: Loading arm not fully up
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Problem gasonics SNF 2010-08-06 11:46:58: exit arm has problem to send finished wafers
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Problem gasonics SNF 2010-08-05 17:32:53: Loading arm not fully up
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Problem gasonics SNF 2010-08-06 11:46:58: exit arm has problem to send finished wafers
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