Problem gasonics SNF 2010-08-30 21:09:48: wafer handeling problems

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Mon Aug 30 21:09:50 PDT 2010


When gasonics was taking one wafer out of the furnace and attempting to place another one in it didn't slot the outgoing wafer, dropping it. Because of this the incoming wafer also dropped. 
When the dropped incoming wafer was rerun, it had to be nudged with tweezers into the correct position on the way into the furnace, and wasn't picked up correctly after exiting the furnace. 




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